A versatile evaporation system, the FC2000 is engineered for efficient operation and clean room use. This machine is a rapid-cycle, load-locked system that maintains the source under vacuum while substrates are reloaded.
Max wafer count: Lift off 42×2″, 13x100mm - Pump down time: 1E-06 < 10mins - E-gun (max pkg): 4x25cc PopTop + 1 fixed pocket - E-gun Power Supply: 6 or 12 kW - Source chamber cryopump: CT-8, 4,000 L/Sec - Separate product chamber circuit for cold and optional hot water
