The Tencor P-17 stylus profilometer is an advanced system designed for precise 2D and 3D measurements of step height, roughness, bow, and stress on scans up to 200mm without the need for stitching. It offers excellent measurement stability, constant force control, and ultra-flat scanning stage. The system features easy recipe setup with point-and-click stage controls, top and side view optics, and a high-resolution camera with optical zoom. It supports automated measurements with pattern recognition, sequencing, and feature detection, and includes various filtering, leveling, and analysis algorithms to accurately quantify surface topography.
Step height: Nanometers to 1000µm - Low force with constant force control: 0.03 to 50mg - Scan full diameter of the sample without stitching - Video: 5MP high-resolution color camera - Arc correction: Removes error due to arc motion of the stylus - Software: Easy-to-use software interface - Production capability: Fully automated with sequencing, pattern recognition and SECS/GEM
