The Parylene Coating System P6 is a specialised instrument for applying Parylene C thin transparent coatings onto various substrates. Parylene coatings provide a thin, uniform, and highly protective barrier against moisture, chemicals, and other environmental factors, making the instrument valuable in industries such as electronics, medical devices, and aerospace for enhancing the reliability and longevity of sensitive components.
Deposited materials: Parylene N, C, (D), F-VT4 - Range of thickness: Max. 30 µm - Chamber size: Ø ca. 200 mm; Height: ca. 200 mm - Pyrolysis: 1,6 kW / max. 750 °C - Ultimate pressure: 1 x 10-3 mbar - Two modes: (i) manual operation of the system by on-screen clicking, (ii) automatic operation of a programmed process - Sample holder: max 6 x 4” wafer - Working temperature: Room temperature - Source: Thermal vapour deposition - Deposition rates: 0,7-1 um/g
